The machines live indoors, far from being able to see GPS signals. Sure, you could require that there be an antenna run to the roof, but you can spoof that stuff.
The thing that helps prevent smuggling of ASML machines is that a) there are few of them (i.e., people would notice), b) it requires tremendous effort to move them at all, let alone without anyone noticing.
Considering that these tools are installed in seismically active areas [0], the last thing a customer would want is for the tool to zeroise itself because of an earthquake.
The thing that helps prevent smuggling of ASML machines is that a) there are few of them (i.e., people would notice), b) it requires tremendous effort to move them at all, let alone without anyone noticing.